Patent Assignment
Reel/Frame 019002/0079
Assignment of Assignor's Interest
Recorded: 2007-03-13
Pages: 3
Assignor
KOSHIISHI, AKIRA
Executed: 2007-02-13
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method, Focus Ring, and Focus Ring Component