Patent Assignment
Reel/Frame 019017/0112
Assignment of Assignor's Interest
Recorded: 2007-03-15
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Electrode Used Therein