Patent Assignment
Reel/Frame 019017/0741
Assignment of Assignor's Interest
Recorded: 2007-03-15
Pages: 4
Assignors
HONDA, MASANOBU
Executed: 2007-02-02
MATSUMOTO, NAOKI
Executed: 2007-02-12
TANAKA, SATOSHI
Executed: 2007-02-06
MATSUI, YUTAKA
Executed: 2007-02-05
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method, and Storage Medium