Patent Assignment
Reel/Frame 019021/0716
Assignment of Assignor's Interest
Recorded: 2007-03-09
Pages: 3
Assignors
TAKAHASHI, TAMAMI
Executed: 2006-12-11
SHIRAKASHI, MITSUHIKO
Executed: 2006-12-11
ITO, KENYA
Executed: 2006-12-14
INOUE, KAZUYUKI
Executed: 2006-12-19
YAMAGUCHI, KENJI
Executed: 2006-12-19
SEKI, MASAYA
Executed: 2006-12-11
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus