Patent Assignment
Reel/Frame 019023/0870
Assignment of Assignor's Interest
Recorded: 2007-03-16
Pages: 6
Assignors
CHANDRACHOOD, MADHAVI R.
Executed: 2007-01-17
GRIMBERGEN, MICHAEL N.
Executed: 2007-01-17
NGUYEN, KHIEM K.
Executed: 2007-01-16
LEWINGTON, RICHARD
Executed: 2007-01-15
IBRAHIM, IBRAHIM M.
Executed: 2007-01-18
PANAYIL, SHEEBA J.
Executed: 2007-02-01
KUMAR, AJAY
Executed: 2007-01-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Mask Etch Plasma Reactor Having an Array of Optical Sensors Viewing the Workpiece Backside and a Tunable Element Controlled in Response to the Optical Sensors