Patent Assignment
Reel/Frame 019034/0918
Assignment of Assignor's Interest
Recorded: 2007-03-20
Pages: 3
Assignors
FUKUMOTO, YASUHIRO
Executed: 2007-02-21
TSUJI, MASAO
Executed: 2007-02-21
MIYAUCHI, HIROSHI
Executed: 2007-02-21
TANIGUCHI, HIDEYUKI
Executed: 2007-02-21
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Support Structure, Heat Treatment Apparatus Using Same, First Sheet-Like Object for Use in the Substrate Support Structure, Method of Manufacturing the Substrate Support Structure, Heat Treatment Apparatus, and Substrate Sucking Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.