Patent Assignment
Reel/Frame 019036/0795
Assignment of Assignor's Interest
Recorded: 2007-03-19
Pages: 5
Assignors
DELGADINO, GERALD A.
Executed: 2006-03-19
HAGBORG, RICHARD
Executed: 2006-03-16
BUCHBERGER, DOUGLAS A., JR.
Executed: 2006-03-17
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT. M/S 2061-LEGAL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Dielectric Etch Process Including in-Situ Backside Polymer Removal for Low-Dielectric Constant Material