Patent Assignment
Reel/Frame 019042/0548
Assignment of Assignor's Interest
Recorded: 2007-03-21
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.