Patent Assignment
Reel/Frame 019065/0180
Assignment of Assignor's Interest
Recorded: 2007-03-26
Pages: 3
Assignor
SASAKI, MASARU
Executed: 2007-03-14
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method