Patent Assignment
Reel/Frame 019070/0276
Assignment of Assignor's Interest
Recorded: 2007-03-27
Pages: 2
Assignor
UKIGAYA, NOBUTAKA
Executed: 2007-03-23
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Film Formation Method with Deposition Source Position Control