Patent Assignment
Reel/Frame 019071/0680
Assignment of Assignor's Interest
Recorded: 2007-03-05
Pages: 3
Assignors
KINSHO, TAKESHI
Executed: 2007-02-13
NAKASHIMA, MUTSUO
Executed: 2007-02-13
HASEGAWA, KOJI
Executed: 2007-02-13
WATANABE, TAKERU
Executed: 2007-02-13
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Fluorine-Containing Silicon Compounds, Silicone Resins, Resist Compositions, and Patterning Process