Patent Assignment
Reel/Frame 019075/0708
Assignment of Assignor's Interest
Recorded: 2007-03-28
Pages: 3
Assignor
YAMAZAWA, YOHEI
Executed: 2007-02-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method of Measuring Amount of Radio-Frequency Current in Plasma