Patent Assignment
Reel/Frame 019080/0219
Assignment of Assignor's Interest
Recorded: 2007-03-27
Pages: 4
Assignor
SCHUSTER, KARL-HEINZ
Executed: 2007-03-12
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithography Optical System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.