Patent Assignment
Reel/Frame 019081/0981
Assignment of Assignor's Interest
Recorded: 2007-03-29
Pages: 5
Assignors
LU, HSIAO-TZU
Executed: 2007-02-07
HSIEH, HUNG CHANG
Executed: 2007-02-07
CHEN, KUCI SHUN
Executed: 2007-02-07
FU, HSUEH-HUNG
Executed: 2007-02-15
HSIEH, CHING-HUA
Executed: 2007-02-15
SHUE, SHAU-LIN
Executed: 2007-02-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods and Systems for Lithography Alignment