Patent Assignment
Reel/Frame 019093/0040
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 4
Assignors
OKA, SHINSUKE
Executed: 2007-03-02
HORIGUCHI, TAKAHIRO
Executed: 2007-03-05
NISHIMURA, KAZUAKI
Executed: 2007-03-02
KITAMURA, MASAYUKI
Executed: 2007-03-05
OHMI, TADAHIRO
Executed: 2007-02-16
HIRAYAMA, MASAKI
Executed: 2007-02-13
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method