Patent Assignment
Reel/Frame 019097/0985
Assignment of Assignor's Interest
Recorded: 2007-03-29
Pages: 2
Assignees
KOKUSAI ELECTRIC SEMICONDUCTOR SERVICE INC.
6-13, 2 CHOME, SHINMEIDAI, HAMURA-SHI, TOKYO 205-0023, JAPAN
SANKO CO., LTD.
28, SAKAMACHI, SHINJUKU-KU, TOKYO, 160-0002, JAPAN
Covered Property
(1)
Power Supply Regulating Apparatus, Semiconductor Manufacturing Apparatus, Method for Controlling Power to Heater, and Method for Manufacturing Semiconductor Device