Patent Assignment
Reel/Frame 019127/0585
Assignment of Assignor's Interest
Recorded: 2007-03-22
Pages: 4
Assignors
CHEN, TIEN
Executed: 2007-03-21
HSIEH, CHIH-MING
Executed: 2007-03-21
LAI, CHIEN-CHANG
Executed: 2007-03-21
LEE, WEN-JIN
Executed: 2007-03-21
CHEN, DA-HSIANG
Executed: 2007-03-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, ROC 300-77, TAIWAN
Covered Property
(1)
System for Cleaning a Wafer