Patent Assignment
Reel/Frame 019130/0514
Assignment of Assignor's Interest
Recorded: 2007-04-05
Pages: 4
Assignor
CHIANG, CHIH-MING
Executed: 2007-04-03
Assignee
UNITED MICROELECTRONICS CORP.
NO. 3, LI-HSIN RD., II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, R.O.C., TAIWAN
Covered Property
(1)
Method and System for Detecting Tilt or Shift of Wafer Transferred Onto Hot Plate in Real Time, and Method and System for Monitoring Baking Process of Wafers in Real Time