Patent Assignment
Reel/Frame 019142/0371
Assignment of Assignor's Interest
Recorded: 2007-04-10
Pages: 8
Assignors
ENGLAND, JONATHAN GERALD
Executed: 2007-04-04
MUKA, RICHARD STEPHEN
Executed: 2007-04-04
LISCHER, D. JEFFREY
Executed: 2007-03-30
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Low-Temperature Ion Implantation