Patent Assignment
Reel/Frame 019146/0625
Assignment of Assignor's Interest
Recorded: 2007-04-11
Pages: 5
Assignors
COLLINS, KENNETH S.
Executed: 2007-03-09
HANAWA, HIROJI
Executed: 2007-03-05
RAMASWAMY, KARTIK
Executed: 2007-03-16
BUCHBERGER, JR., DOUGLAS A.
Executed: 2007-03-06
RAUF, SHAHID
Executed: 2007-03-05
BERA, KALLOL
Executed: 2007-03-02
WONG, LAWRENCE
Executed: 2007-03-05
MERRY, WALTER R.
Executed: 2007-03-07
MILLER, MATTHEW L.
Executed: 2007-03-05
SHANNON, STEVEN C.
Executed: 2007-03-05
NGUYEN, ANDREW
Executed: 2007-03-05
CRUSE, JAMES P.
Executed: 2007-03-06
CARDUCCI, JAMES
Executed: 2007-03-16
DETRICK, TROY S.
Executed: 2007-03-19
DESHMUKH, SUBHASH
Executed: 2007-03-05
SUN, JENNIFER Y.
Executed: 2007-03-02
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Processing a Workpiece in a Plasma Reactor with Variable Height Ground Return Path to Control Plasma Ion Density Uniformity