Patent Assignment
Reel/Frame 019157/0482
Assignment of Assignor's Interest
Recorded: 2007-04-13
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Real-Time Parameter Tuning Using Wafer Temperature