Patent Assignment
Reel/Frame 019158/0106
Assignment of Assignor's Interest
Recorded: 2007-04-13
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and System for Monitoring Photolithography Processing Based on a Batch Change in Light Sensitive Material