Patent Assignment
Reel/Frame 019159/0138
Assignment of Assignor's Interest
Recorded: 2007-04-13
Pages: 5
Assignors
GRUNER, TORALF
Executed: 2006-08-03
CONRADI, OLAF
Executed: 2006-08-28
DIECKMANN, NILS
Executed: 2006-08-04
SCHWAB, MARKUS
Executed: 2006-09-13
DITTMANN, OLAF
Executed: 2006-08-07
TOTZECK, MICHAEL
Executed: 2006-09-25
KRAEHMER, DANIEL
Executed: 2006-08-03
KAMENOV, VLADIMIR
Executed: 2006-08-23
Assignee
CARL ZEISS SMT AG
CARL-ZEISS STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Apparatus and Method for Operating the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.