Patent Assignment
Reel/Frame 019172/0018
Assignment of Assignor's Interest
Recorded: 2007-04-16
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Showerhead Electrodes and Showerhead Electrode Assemblies Having Low-Particle Performance for Semiconductor Material Processing Apparatuses