Patent Assignment
Reel/Frame 019174/0649
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 3
Assignor
CLARK, ROBERT D.
Executed: 2007-03-30
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Strained Metal Nitride Films and Method of Forming