Patent Assignment
Reel/Frame 019174/0652
Assignment of Assignor's Interest
Recorded: 2007-04-17
Pages: 4
Assignors
MANI, RADHIKA
Executed: 2007-04-13
GANI, NICOLAS
Executed: 2007-04-13
LIU, WEI
Executed: 2007-04-16
SHEN, MEIHUA
Executed: 2007-04-16
DESHMUKH, SHASHANK C.
Executed: 2007-04-13
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Etching High K Dielectrics with High Selectivity to Oxide Containing Layers at Elevated Temperatures with BC13 Based Etch Chemistries