Patent Assignment
Reel/Frame 019177/0359
Assignment of Assignor's Interest
Recorded: 2007-04-18
Pages: 3
Assignor
BRCKA, JOZEF
Executed: 2007-04-13
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Multi-Zone Gas Distribution System for a Treatment System