Patent Assignment
Reel/Frame 019181/0934
Merger
Recorded: 2007-04-23
Received: 2007-04-23
Pages: 7
Assignor
MYKROLIS CORPORATION
Executed: 2005-08-05
Assignee
ENTEGRIS, INC.
3500 LYMAN BOULEVARD, CHASKA, MN, 55318, UNITED STATES
Covered Properties
(14)
Variable Capacitance Measuring Device
Application:
10/952,508 →
Method and System for Flow Measurement and Validation of a Mass Flow Controller
Application:
10/946,031 →
Method and System for Flow Measurement and Validation of a Mass Flow Controller
Application:
10/887,591 →
Method for Digitally Controlling a Sensor System
Application:
10/848,739 →
Variable Capacitance Measuring Device Comprising a Glass-Ceramic Insulator
Application:
10/228,612 →
Variable Capacitance Measuring Device
Application:
10/178,170 →
Electronic Interface for Use with Dual Electrode Capacitance Diaphragm Gauges
Application:
10/064,136 →
Temperature Regulator for Use with a Pressure Sensing Device
Application:
10/064,137 →
System and Method of Operation of a Digital Mass Flow Controller
Application:
10/068,052 →
System and Method for a Digital Mass Flow Controller
Application:
10/062,080 →
System and Method of Operation of a Digital Mass Flow Controller
Application:
10/006,774 →
System and Method for Integrating Gas Components
Application:
09/961,595 →
Pendulum Valve with a Full Range of Position Control
Application:
09/952,083 →
Method and System Providing Improved Security for the Transfer of Root Keys
Application:
09/919,960 →