IP Library Granted Patent US 6,837,111
Granted Patent B2
US 6,837,111 · App. 10/228,612 · Granted Jan 4, 2005

Variable capacitance measuring device

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Quick Facts
Patent No.
US 6,837,111
App. No.
10/228,612
Granted
Jan 4, 2005
Kind
B2
Abstract

A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. A shim may be used during the formation of the insulating material to reduce the likelihood of the insulator adhering to surfaces of the electrode portion during the manufacturing process. Also, separate bake-out and getter activation cycles may be combined into a single heat cycle.

Claims (30)

1. A component for a variable capacitance measuring device comprising:

an electrode assembly including an electrode portion having a first width;

a glass-ceramic insulating material surrounding a portion of the electrode assembly; and

a solid material lying between the electrode portion and the insulating material, wherein the solid material has a second width that is wider than the first width.

2. The component of claim 1 , wherein the solid material contacts the electrode portion and the insulating material.

3. The component of claim 1 , further comprising a gettering material within the electrode assembly.

4. The component of claim 3 , wherein the insulating material surrounds at least a portion of the gettering material.

5. The component of claim 1 , wherein the electrode assembly is a single-piece electrode assembly.

6. A variable capacitance measuring device comprising the component of claim 1 .

7. A component for a variable capacitance measuring device comprising:

an electrode assembly;

a getter housing lying within the electrode assembly; and

a ring laterally surrounding portions of the electrode assembly and the getter housing.

8. The component of claim 7 , wherein:

the electrode assembly is a single-piece electrode assembly that comprises a first electrode; and

the ring is electrically connected to a second electrode.

9. The component of claim 7 , further comprising:

an insulating material lying between and contacting the electrode assembly and the ring; and

the insulating material surrounds a portion of the gettering housing.

10. A variable capacitance measuring device comprising the component of claim 7 .

11. A component for a variable capacitance measuring device comprising a single-piece electrode assembly, wherein:

the single-piece electrode assembly comprises an electrode portion; and

the electrode portion has an electrode surface.

12. The component of claim 11 , further comprising:

a gettering housing lying within the single-piece electrode assembly; and

an insulating material that surrounds at least part of the gettering housing.

13. A variable capacitance measuring device comprising the component of claim 11 .

14. The component of claim 12 , further comprising a pinch-off tube connected to the electrode assembly, wherein the gettering housing, the electrode portion and the pinch-off tube are axially aligned.

15. The component of claim 14 , wherein the single-piece electrode assembly forms the gettering housing.

16. The component of claim 15 , wherein the insulating material is a glass ceramic insulating material.

Assignments (10)
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, LLC; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND, LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0605 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: TENNENBAUM CAPITAL PARTNERS, LLC
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0624 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, L.L.C.; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0642 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: THE BANK OF NEW YORK MELLON; TPG PARTNERS III, L.P.; TPG INVESTORS III, L.P.; TPG DUTCH PARALELL III, C.V.; FOF PARTNERS III, L.P.; FOF PARTNERS III-B, L.P.; T3 GENPAR II, L.P.; T3 PARALLEL II, L.P.; TPG PARTNERS IV, L.P.; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0663 →
SECURITY AGREEMENT Recorded Jun 5, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 021050/0279 →
SECURITY AGREEMENT Recorded May 27, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 020995/0403 →
SECURITY AGREEMENT Recorded Apr 16, 2008
From: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
To: THE BANK OF NEW YORK
Reel/Frame 020808/0538 →
TRANSITION EXTENSION AND AMENDMENT AGREEMENT (REDACTED) Recorded Apr 30, 2007
From: ENTEGRIS, INC.
To: CELERITY, INC.
Reel/Frame 019224/0440 →
MERGER Recorded Apr 23, 2007
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 019181/0934 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 27, 2002
From: MEI, HAI
To: MYKROLIS CORPORATION
Reel/Frame 013243/0564 →