Patent Assignment
Reel/Frame 019188/0141
Assignment of Assignor's Interest
Recorded: 2007-03-30
Pages: 3
Assignors
NARAHARA, KAZUHIRO
Executed: 2007-03-28
KATO, HIROTAKA
Executed: 2007-03-28
HAYASHIDA, KOICHIRO
Executed: 2007-03-28
Assignee
SUMCO TECHXIV CORPORATION
25-1 SHINOMIYA 3-CHOME, HIRATSUKA-SHI, KANAGAWA, 254-0014, JAPAN
Covered Property
(1)
Method of Manufacturing Epitaxial Silicon Wafer and Apparatus Therefor