Patent Assignment
Reel/Frame 019203/0640
Assignment of Assignor's Interest
Recorded: 2007-04-24
Pages: 4
Assignors
YUEN, STEPHEN
Executed: 2007-03-23
TODOROW, VALENTIN
Executed: 2007-03-28
KIM, TAE WON
Executed: 2007-03-23
KHAN, ANISUL
Executed: 2007-03-26
DESHMUKH, SHASHANK
Executed: 2007-03-26
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods to Eliminate "M-Shape" Etch Rate Profile in Inductively Coupled Plasma Reactor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.