Patent Assignment
Reel/Frame 019218/0048
Assignment of Assignor's Interest
Recorded: 2007-04-26
Pages: 3
Assignor
MOEGGENBORG, KEVIN
Executed: 2007-04-26
Assignee
CABOT MICROELECTRONICS CORPORATION
870 NORTH COMMONS DRIVE, AURORA, ILLINOIS, 60504
Covered Property
(1)
Methods for polishing aluminum nitride
Application:
60/859,172 →