Methods for polishing aluminum nitride

Inventor: Kevin J. Moeggenborg

Provisional Application Expired

	Code	Description	Pages	PDF
2006-11-29	`APP.FILE.REC`	Filing Receipt	3	View
2006-11-15	`TRNA`	Transmittal of New Application	1	View
2006-11-15	`SPEC`	Specification	8	View
2006-11-15	`CLM`	Claims	2	View
2006-11-15	`ABST`	Abstract	1	View
2006-11-15	`WFEE`	Fee Worksheet (SB06)	1	View

Inventors

Kevin J. Moeggenborg Naperville, IL

Attorneys & Agents of Record

ROBERT ROSS Reg. 45058 Attorney · OLSON & CEPURITIS, LTD.

THOMAS OMHOLT Reg. 37052 Agent · CABOT MICROELECTRONICS CORPORATION

BRIAN SZYMANSKI Reg. 39523 Attorney · ENGTEGRIS, INC.

CATHERINE GATES Reg. 51132 Agent · ENTEGRIS

ERIKA SINGLETON Reg. 52368 Attorney · CABOT MICROELECTRONICS LEGAL DEPARTMENT

COLIN DURHAM Reg. 52843 Attorney · ENTEGRIS, INC.

NIDHI KISSOON Reg. 69108 Attorney · INTERNATIONAL BUSINESS MACHINES, IBM

ERIC NIELSON Reg. 72825 Attorney · ENTEGRIS

SAMUEL BLIESNER Reg. 81591 Agent · ENTEGRIS, INC.

SOMMER SKEPS Reg. 83192 Attorney · ENTEGRIS INC.

Prosecution

CABOT MICROELECTRONICS CORPORATION

from MOEGGENBORG, KEVIN

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2007-04-26

Monitor This Case

Get email alerts when status or documents change.

Order Certified Copies

Most orders are placed with the USPTO same day — all within 24 business hours.

Pre-filled with this application's details

Quick Facts

External Links