Patent Assignment
Reel/Frame 019233/0665
Assignment of Assignor's Interest
Recorded: 2007-05-01
Pages: 4
Assignors
FELDMANN, HEIKO
Executed: 2007-03-19
EPPLE, ALEXANDER
Executed: 2007-03-19
BLAHNIK, VLADAN
Executed: 2007-04-12
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus
Application:
11/573,628 →
Publication:
US 2011/0134403
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.