Patent Assignment
Reel/Frame 019241/0102
Assignment of Assignor's Interest
Recorded: 2007-05-03
Pages: 2
Assignor
HASEGAWA, TOSHIO
Executed: 2007-05-02
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
Method for Depositing Titanium Nitride Films for Semiconductor Manufacturing