Patent Assignment
Reel/Frame 019249/0083
Assignment of Assignor's Interest
Recorded: 2007-05-03
Pages: 8
Assignors
KAMENOV, VLADIMIR
Executed: 2007-04-03
KRAEHMER, DANIEL
Executed: 2007-04-02
TOTZECK, MICHAEL
Executed: 2007-03-30
GRUNER, TORALF
Executed: 2007-04-03
DODOC, DR. AURELIAN
Executed: 2007-03-30
SHAFER, DAVID
Executed: 2007-04-04
ULRICH, WILHELM
Executed: 2007-04-02
VON BUENAU, RUDOLF
Executed: 2007-03-29
MANN, HANS-JUERGEN
Executed: 2007-04-04
EPPLE, ALEXANDER
Executed: 2007-04-02
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.