Patent Assignment
Reel/Frame 019249/0391
Assignment of Assignor's Interest
Recorded: 2007-05-03
Pages: 2
Assignors
ITATANI, HIDEHARU
Executed: 2007-04-06
YANAI, HIDEHIRO
Executed: 2007-04-06
HORII, SADAYOSHI
Executed: 2007-04-06
SANO, ATSUSHI
Executed: 2007-04-06
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.