Patent Assignment
Reel/Frame 019281/0750
Assignment of Assignor's Interest
Recorded: 2007-05-04
Pages: 3
Assignors
MATSUSHITA, HIROSHI
Executed: 2007-04-18
SUGAMOTO, JUNJI
Executed: 2007-04-20
ASANO, MASAFUMI
Executed: 2007-04-24
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Controlling Semiconductor Manufacturing Apparatus and Control System of Semiconductor Manufacturing Apparatus