Patent Assignment
Reel/Frame 019282/0677
Assignment of Assignor's Interest
Recorded: 2007-05-11
Pages: 3
Assignors
OKUDA, HIROHITO
Executed: 2007-04-26
HIROI, TAKASHI
Executed: 2007-04-26
HASEGAWA, MASAKI
Executed: 2007-04-27
TANAKA, SHIGEYA
Executed: 2007-04-26
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Pattern Defects and Mirror Electron Projection Type or Multi-Beam Scanning Type Electron Beam Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.