Patent Assignment
Reel/Frame 019301/0691
Assignment of Assignor's Interest
Recorded: 2007-05-16
Pages: 4
Assignors
CHEN, LEE
Executed: 2007-03-29
SUNDARARAJAN, RADHA
Executed: 2007-03-29
FUNK, MERRITT
Executed: 2007-03-29
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Dynamic Control of Process Chemistry for Improved Within-Substrate Process Uniformity