Patent Assignment
Reel/Frame 019303/0397
Assignment of Assignor's Interest
Recorded: 2007-05-15
Pages: 3
Assignors
SHIH, HONG
Executed: 2007-03-28
YIN, YAOBO
Executed: 2007-03-28
WU, SHUN JACKSON
Executed: 2007-04-02
AVOYAN, ARMEN
Executed: 2007-03-28
DAUGHERTY, JOHN E.
Executed: 2007-03-28
JIANG, LINDA
Executed: 2007-03-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methodology for Cleaning of Surface Metal Contamination from Electrode Assemblies