Patent Assignment
Reel/Frame 019307/0024
Assignment of Assignor's Interest
Recorded: 2007-05-17
Pages: 5
Assignors
BEDER, SUSANNE
Executed: 2007-04-24
ULRICH, WILHELM
Executed: 2007-04-24
FELDMANN, HEIKO
Executed: 2007-04-24
SINGER, WOLFGANG
Executed: 2007-04-23
GRUNER, TORALF
Executed: 2007-04-24
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective Adapted for Use with Different Immersion Fluids or Liquids, Method of Conversion of Such and Production Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.