Patent Assignment
Reel/Frame 019309/0296
Assignment of Assignor's Interest
Recorded: 2007-05-17
Pages: 3
Assignor
ISHIKAWA, HIRAKU
Executed: 2007-04-25
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Film-Forming Apparatus and Plasma Film-Forming Method