Patent Assignment
Reel/Frame 019314/0236
Assignment of Assignor's Interest
Recorded: 2007-05-14
Pages: 3
Assignors
FIOLKA, DAMIAN
Executed: 2006-09-12
MAUL, MANFRED
Executed: 2006-09-12
DAVYDENKO, VLADIMIR
Executed: 2006-09-18
SCHOLZ, AXEL
Executed: 2006-09-18
DEGUENTHER, MARKUS
Executed: 2006-09-18
WANGLER, JOHANNES
Executed: 2006-09-18
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.