Patent Assignment
Reel/Frame 019318/0033
Assignment of Assignor's Interest
Recorded: 2007-05-17
Pages: 2
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Lighting Optical Device, Regulation Method for Lighting Optical Device, Exposure System, and Exposure Method