Patent Assignment
Reel/Frame 019319/0288
Assignment of Assignor's Interest
Recorded: 2007-05-18
Pages: 4
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Exposure Apparatus for Microlithography
Application:
11/577,531 →
Publication:
US 2009/0213342
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.