Patent Assignment
Reel/Frame 019320/0290
Assignment of Assignor's Interest
Recorded: 2007-05-21
Received: 2007-05-21
Pages: 2
Assignor
HIRAO, SHUJI
Executed: 2006-08-31
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006 OAZA KADOMA, KADOMA-SHI, OSAKA, JPX, 571-8501, JAPAN
Covered Property
(1)
Etching method and etching apparatus
Application:
11/580,945 →