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App. No. 11/580,945 · Confirmation No. 6543

Etching method and etching apparatus

Inventor: Shuji Hirao
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2009-08-20 ABN Abandonment 2 View
2008-11-18 CTRS Requirement for Restriction/Election 6 View
2008-11-18 FWCLM Index of Claims 1 View
2007-06-14 NTC.PUB Notice of Publication 1 View
2006-11-02 APP.FILE.REC Filing Receipt 3 View
2006-10-16 TRNA Transmittal of New Application 2 View
2006-10-16 SPEC Specification 15 View
2006-10-16 CLM Claims 3 View
2006-10-16 ABST Abstract 1 View
2006-10-16 DRW Drawings-only black and white line drawings 9 View
2006-10-16 OATH Oath or Declaration filed 3 View
2006-10-16 WFEE Fee Worksheet (SB06) 1 View
2006-10-16 WFEE Fee Worksheet (SB06) 1 View
2006-10-16 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-10-16 FOR Foreign Reference 17 View
2006-10-16 FRPR Certified Copy of Foreign Priority Application 25 View
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Quick Facts
App. No.
11/580,945
Filed
2006-10-16
Pub. No.
US20070134929A1
Art Unit
1792