Patent Assignment
Reel/Frame 019321/0759
Assignment of Assignor's Interest
Recorded: 2007-05-21
Pages: 5
Assignors
CAI, ZHONGPING
Executed: 2007-05-18
SLOBODOV, ALEXANDER
Executed: 2007-05-18
ROMANOVSKY, ANATOLY
Executed: 2007-05-18
WOLTERS, CHRISTIAN H.
Executed: 2007-05-18
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Inspection Systems and Methods for Extending the Detection Range of an Inspection System by Forcing the Photodetector into the Non-Linear Range