Patent Assignment
Reel/Frame 019322/0866
Assignment of Assignor's Interest
Recorded: 2007-05-21
Pages: 5
Assignors
ZHAO, GUOHENG
Executed: 2007-05-08
BELYAEV, ALEXANDER
Executed: 2007-04-30
WOLTERS, CHRISTIAN H.
Executed: 2007-04-25
DOYLE, PAUL ANDREW
Executed: 2007-05-07
DANDO, HOWARD W.
Executed: 2007-05-07
VAEZ-IRAVANI, MEHDI
Executed: 2007-05-07
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Stabilizing a Substrate Using a Vacuum Preload Air Bearing Chuck